-
Microfluidic system for extraterrestrial artificial photosynthetic device
Author: Yang, Qingjun; Dong, Rizhi; Yang, Shangru; Zhu, Rui
Journal: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. 2023; Vol. 29, Issue 1, pp. 49-61. DOI: 10.1007/s00542-022-05370-0
-
MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors
Author: Wei, Lei; You, Zhiwei; Kuai, Xuebao; Zhang, Mingliang; Yang, Fuhua; Wang, Xiaodong
Journal: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. 2023; Vol. 29, Issue 1, pp. 1-17. DOI: 10.1007/s00542-022-05391-9
-
The fabrication of microlens array in PMMA material with the assistant of nickel pillars by LIGA technology and thermal reflow method
Author: Liang, Xiaoxiao; Yan, Mingming; Xu, Yuanze; Zhang, Tianchong; Zhang, Dongni; Zhang, Changrui; Wang, Bo; Yi, Futing; Liu, Jing
Journal: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. 2023; Vol. , Issue , pp. -. DOI: 10.1007/s00542-023-05452-7
-
Recent studies on the application of piezoelectric pump in different fields
Author: Hu, Renhui; He, Lipeng; Hu, Dianbin; Hou, Yi; Cheng, Guangming
Journal: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. 2023; Vol. , Issue , pp. -. DOI: 10.1007/s00542-023-05453-6
-
Design and analysis of a novel low RF MEMS switch with low pull-in voltage and high capacitance ratio
Author: Deng, Zhongliang; Lai, Chengqi; Zhou, Jiali; Wang, Yucheng
Journal: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. 2023; Vol. , Issue , pp. -. DOI: 10.1007/s00542-023-05459-0
-
Influence of surface effect on post-buckling behavior of graded porous nanobeam subjected to follower force
Author: Li, Qinglu; Zhang, Haikun
Journal: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. 2023; Vol. , Issue , pp. -. DOI: 10.1007/s00542-023-05458-1
-
A tri-stable structure of piezoelectric-electromagnetic composite energy harvester (TPEEH)
Author: Peng, Zhaoyang; Song, Fang; Xiong, Yuzhong
Journal: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. 2023; Vol. 29, Issue 2, pp. 243-251. DOI: 10.1007/s00542-023-05416-x
-
Modeling and analysis of MEMS capacitive pressure sensors with vertical comb fingers
Author: Liu, Zhenyu; Zhu, Yusi; Du, Lidong; Zhao, Zhan; Fang, Zhen
Journal: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. 2023; Vol. , Issue , pp. -. DOI: 10.1007/s00542-023-05425-w