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Research on femtosecond laser direct writing-based thermally induced shrinkage proces
Author: Xie, Yu; Liu, Yongkang; Chen, Jianxiong; Chen, Hui; Hong, Shujin
Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2026; Vol. 36, Issue 4, pp. -. DOI: 10.1088/1361-6439/ae4ef7
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On-wafer compression test method with endogenous mechanical compensation mechanism for buckling behaviour and etching quality characterizatio
Author: Chen, Yi; Zhang, Dacheng
Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2026; Vol. 36, Issue 4, pp. -. DOI: 10.1088/1361-6439/ae5666
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A novel friction test device for nanoscale gap surfaces with sandwiched lubrican
Author: Yagi, Wataru; Xia, Yuanlin; Tsuchiya, Toshiyuki; Yamashita, Naoki; Hirayama, Tomoko
Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2026; Vol. 36, Issue 4, pp. -. DOI: 10.1088/1361-6439/ae54a2
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Fabrication and characterization of Cu/GO composite microcomponents via jet electrodepositio
Author: Li, Aoxiang; Xi, Yuntao; Zhou, Bo; Lei, Yudong; Ren, Li; Pan, Bowei; Xie, Longfei; Wang, Tingli; Su, Bo
Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2026; Vol. 36, Issue 4, pp. -. DOI: 10.1088/1361-6439/ae597e
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Heterogeneously integrated chain-type micro thermoelectric generator enabled by shared-via LTCC technolog
Author: Tian, Xueqing; Chen, Qing; Niu, Xinrui; Xu, Jianren; Wei, Li; Dai, Bo; Zhang, Dawei; Di, Zhixiong; Wang, Ning
Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2026; Vol. 36, Issue 3, pp. -. DOI: 10.1088/1361-6439/ae54a1
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An improved Bi-LSTM framework based on DWT-MTF-2DCNN for multi-condition temperature prediction in microchannel heat exchange
Author: Su, Tianyi; Chen, Lei; Ma, Yuanyuan; Wu, Wenzhuo; Li, Jin
Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2026; Vol. 36, Issue 3, pp. -. DOI: 10.1088/1361-6439/ae4a31
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Characteristic of LiNbO3 thin film ICP etching for micro/nano fabricatio
Author: Huang, Yantao; Liu, Yushuai; Wu, Tao
Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2026; Vol. 36, Issue 3, pp. -. DOI: 10.1088/1361-6439/ae36b6
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Temperature compensation of surface acoustic wave strain sensors on 122° X-cut lithium tantalate substrate at high temperature
Author: Yang, Gaoshang; Wang, Yuexing; Yang, Zhengzhong; Sun, Xiangyu; Yao, Yao
Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2026; Vol. 36, Issue 3, pp. -. DOI: 10.1088/1361-6439/ae4e38