| Piezoresistive microcantilevers for humidity sensing |
15 |
| High frequency, low power, electrically actuated shape memory alloy MEMS bimorph thermal actuators |
13 |
| A eutectic-alloy-infused soft actuator with sensing, tunable degrees of freedom, and stiffness properties |
11 |
| Improvement of energy conversion effectiveness and maximum output power of electrostatic induction-type MEMS energy harvesters by using symmetric comb-electrode structures |
9 |
| DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro- and nanostructures by a modified Bosch etch process |
9 |
| Nanogenerator for scavenging low frequency vibrations |
9 |
| Novel threshold pressure sensors based on nonlinear dynamics of MEMS resonators |
8 |
| Numerical and experimental investigations into microchannel formation in glass substrate using electrochemical discharge machining |
8 |
| Fabrication and characterization of bending and pressure sensors for a soft prosthetic hand |
8 |
| Targeted drug delivery technology using untethered microrobots: a review |
8 |
| A precise spacing-control method in MEMS packaging for capacitive accelerometer applications |
7 |
| Toward the design of monolithic 23.1% efficient hysteresis and moisture free perovskite/c-Si HJ tandem solar cell: a numerical simulation study |
7 |
| Nanofiber-reinforced soft fluidic micro-actuators |
7 |
| Rapid prototyping of force/pressure sensors using 3D-and inkjet-printing |
7 |
| Single-cell electroporation: current trends, applications and future prospects |
7 |
| An experimental study on flow friction and heat transfer of water in sinusoidal wavy silicon microchannels |
6 |
| AC electrothermal mixing for high conductive biofluids by arc-electrodes |
6 |
| Hydrodynamic cavitation in microfluidic devices with roughened surfaces |
6 |
| Electrohydrodynamic (EHD) jet printing with a circulating dual-channel nozzle |
6 |
| Conformable liquid metal printed epidermal electronics for smart physiological monitoring and simulation treatment |
6 |
| Ultrathin flexible piezoelectric sensors for monitoring eye fatigue |
6 |
| A 5 mg micro-bristle-bot fabricated by two-photon lithography |
6 |
| Patterning sub-30 mu m liquid metal wires on PDMS substrates via stencil lithography and pre-stretching |
6 |
| Fabrication of ternary Ge-Se-Sb chalcogenide microlens arrays using thermal reflow |
5 |
| Compensation of frequency split by directional lapping in fused quartz micro wineglass resonators |
5 |
| Fabrication of all glass microfluidic device with superior chemical and mechanical resistances by glass molding with vitreous carbon mold |
5 |
| Low-voltage high-reliability MEMS switch for millimeter wave 5G applications |
5 |
| A highly-sensitive flexible tactile sensor array utilizing piezoresistive carbon nanotube-polydimethylsiloxane composite |
5 |
| Flexible, transparent, sub-100 mu m microfluidic channels with fused deposition modeling 3D-printed thermoplastic polyurethane |
5 |
| A novel piezostack-driven jetting dispenser with corner-filleted flexure hinge and high-frequency performance |
5 |
| A single MEMS resonator for reconfigurable multifunctional logic gates |
5 |
| Metal-assisted-chemical-etching of silicon nanowires for templating 3D graphene growth towards energy storage in microsystems |
5 |
| Elastocapillary flow driven lab-on-a-membrane device based on differential wetting and sedimentation effect for blood plasma separation |
5 |
| A mass manufacturable thermoplastic based microfluidic droplet generator on cyclic olefin copolymer |
5 |
| Encapsulation of complex solutions using droplet microfluidics towards the synthesis of artificial cells |
5 |
| Carbon nanostructure based mechano-nanofluidics |
5 |
| Surface texture formation by non-resonant vibration assisted micro milling |
5 |
| Intelligent gas-sensing systems and their applications |
5 |
| Effect of via depth on the TSV filling process for different current densities |
5 |
| On-ratio PDMS bonding for multilayer microfluidic device fabrication |
5 |
| Rapid and inexpensive method for fabrication of multi-material multi-layer microfluidic devices |
5 |
| Superhydrophobic hierarchical three-level structures on 3D polypropylene surfaces |
4 |
| On traveling-wave field-effect flow control for simultaneous induced-charge electroosmotic pumping and mixing in microfluidics: physical perspectives and theoretical analysis |
4 |
| Cascadable microelectromechanical resonator logic gate |
4 |
| Soft-rigid interaction mechanism towards a lobster-inspired hybrid actuator |
4 |
| MEMS electret energy harvester with embedded bistable electrostatic spring for broadband response |
4 |
| Dual actuation micro-mirrors |
4 |
| Anisotropic etching of Si |
4 |
| Realizing spike-timing dependent plasticity learning rule in Pt/Cu:ZnO/Nb:STO memristors for implementing single spike based denoising autoencoder |
4 |
| Unidirectional and bidirectional valveless electromagnetic micropump with PDMS-Fe3O4 nanocomposite magnetic membrane |
4 |
