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Bias Thermal Stability Improvement of Mode-Matching MEMS Gyroscope Using Mode Deflection
Author: Wang, Peng; Li, Qingsong; Zhang, Yongmeng; Wu, Yulie; Wu, Xuezhong; Xiao, Dingbang
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. 2023; Vol. 32, Issue 1, pp. 1-3. DOI: 10.1109/JMEMS.2022.3218723
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Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization
Author: Wang, Kunfeng; Xiong, Xingyin; Wang, Zheng; Ma, Liangbo; Zhai, Zhaoyang; Zou, Xudong
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. 2023; Vol. 32, Issue 1, pp. 7-15. DOI: 10.1109/JMEMS.2022.3222161
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Silicon-Based Stretchable Structure via Parylene Kirigami Interconnection
Author: Xu, Han; Zhang, Meixuan; Chen, Lang; Zhang, Pan; Jin, Yufeng; Wang, Wei
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. 2023; Vol. 32, Issue 1, pp. 82-90. DOI: 10.1109/JMEMS.2022.3223059
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Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error
Author: Ruan, Zhihu; Ding, Xukai; Gao, Yang; Qin, Zhengcheng; Li, Hongsheng
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. 2023; Vol. 32, Issue 1, pp. 16-28. DOI: 10.1109/JMEMS.2022.3228268
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Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications
Author: Yu, Bo; Yu, Can; Zhang, Liang; Wang, Zhuochen; Xu, Xingli; He, Anwei; Wang, Xiaohe; Niu, Pengfei; Pang, Wei
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. 2023; Vol. 32, Issue 2, pp. 164-172. DOI: 10.1109/JMEMS.2022.3230054
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A Subwavelength-Grating-Mirror-Based MEMS Tunable Fabry-Perot Filter for Hyperspectral Infrared Imaging
Author: Mao, Haifeng; Dong, Xianshan; Liu, Yihui
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. 2023; Vol. 32, Issue 1, pp. 57-66. DOI: 10.1109/JMEMS.2022.3215939
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Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure
Author: Qu, Yuanhang; Gu, Xiyu; Zou, Yang; Wen, Zhiwei; Cai, Yao; Soon, Bo Woon; Liu, Yan; Sun, Chengliang
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. 2023; Vol. 32, Issue 2, pp. 157-163. DOI: 10.1109/JMEMS.2023.3243001
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Serial and Parallel Connections of Micromechanical Resonators for Sensing: Theories and Applications
Author: Chang, Honglong
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. 2023; Vol. , Issue , pp. -. DOI: 10.1109/JMEMS.2023.3259950
