| Review of Micro Thermoelectric Generator |
22 |
| Investigation of Multimodal Electret-Based MEMS Energy Harvester With Impact-Induced Nonlinearity |
22 |
| Accurate Extraction of Large Electromechanical Coupling in Piezoelectric MEMS Resonators |
15 |
| 4.5 GHz Lithium Niobate MEMS Filters With 10% Fractional Bandwidth for 5G Front-Ends |
11 |
| Monolayer MoS2 Strained to 1.3% With a Microelectromechanical System |
9 |
| X-Cut Lithium Niobate Laterally Vibrating MEMS Resonator With Figure of Merit of 1560 |
9 |
| Ultra Deep Reactive Ion Etching of High Aspect-Ratio and Thick Silicon Using a Ramped-Parameter Process |
8 |
| Exploration of Metal 3-D Printing Technologies for the Microfabrication of Freeform, Finely Featured, Mesoscaled Structures |
8 |
| Fused Silica Micro Shell Resonator With T-Shape Masses for Gyroscopic Application |
8 |
| MEMS-Based Thermoelectric-Photoelectric Integrated Power Generator |
8 |
| Resonant Microelectromechanical Receiver |
8 |
| The Multi-Mode Resonance in AlN Lamb Wave Resonators |
7 |
| A High Resolution Differential Mode-Localized MEMS Accelerometer |
7 |
| High-Accuracy Ultrasonic Rangefinders via pMUTs Arrays Using Multi-Frequency Continuous Waves |
7 |
| Highly Sensitive and Flexible Tactile Sensor Based on Porous Graphene Sponges for Distributed Tactile Sensing in Monitoring Human Motions |
7 |
| A Resonant MEMS Accelerometer With 56ng Bias Stability and 98ng/Hz(1/2) Noise Floor |
7 |
| Octagon-Shaped 2-D Micromachined Thermal Wind Sensor for High-Accurate Applications |
6 |
| A Closed-Loop Mode-Localized Accelerometer |
6 |
| Piezoelectric Membrane Actuators for Micropump Applications Using PVDF-TrFE |
6 |
| Precision Plating of Human Electrogenic Cells on Microelectrodes Enhanced With Precision Electrodeposited Nano-Porous Platinum for Cell-Based Biosensing Applications |
6 |
| Parylene-Based Cuff Electrode With Integrated Microfluidics for Peripheral Nerve Recording, Stimulation, and Drug Delivery |
6 |
| Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection |
6 |
| Origins and Mechanisms of Bias Instability Noise in a Three-Axis Mode-Matched MEMS Gyroscope |
6 |
| Capacitive MEMS Accelerometer With Perforated and Electrically Separated Mass Structure for Low Noise and Low Power |
6 |
| Fully 3D-Printed, Monolithic, Mini Magnetic Actuators for Low-Cost, Compact Systems |
6 |
| Amplitude- and Gas Pressure-Dependent Nonlinear Damping of High-Q Oscillatory MEMS Micro Mirrors |
6 |
| Quality Factor Improvement in the Disk Resonator Gyroscope by Optimizing the Spoke Length Distribution |
6 |
| Investigation of Electromechanical Coupling and Quality Factor of X-Cut Lithium Niobate Laterally Vibrating Resonators Operating Around 400 MHz |
6 |
| Piezoelectric Pressure Sensors for Hypersonic Flow Measurements |
6 |
| On Cavitation on Chip in Microfluidic Devices With Surface and Sidewall Roughness Elements |
5 |
| RF Filters with Periodic Passbands for Sparse Fourier Transform-Based Spectrum Sensing |
5 |
| Wafer-Level Vacuum Sealing by Transfer Bonding of Silicon Caps for Small Footprint and Ultra-Thin MEMS Packages |
5 |
| Thermomechanical-Noise-Limited Capacitive Transduction of Encapsulated MEM Resonators |
5 |
| Monolithic, 3D-Printed Microfluidic Platform for Recapitulation of Dynamic Tumor Microenvironments |
5 |
| CMOS Neural Probe With 1600 Close-Packed Recording Sites and 32 Analog Output Channels |
5 |
| Fabrication and Characterization of a 3D Printed, MicroElectrodes Platform With Functionalized Electrospun Nano-Scaffolds and Spin Coated 3D Insulation Towards Multi- Functional Biosystems |
5 |
| Study of Energy Loss Mechanisms in AlN-Based Piezoelectric Length Extensional-Mode Resonators |
5 |
| Design and Modeling of Piezoelectrically Driven Micro-Actuator With Large Out-of-Plane and Low Driving Voltage for Micro-Optics |
5 |
| Thermal-Piezoresistive SOI-MEMS Oscillators Based on a Fully Differential Mechanically Coupled Resonator Array for Mass Sensing Applications |
5 |
| Analysis of Thermally Actuated RF-MEMS Switches for Power Limiter Applications |
5 |
| Direct Detection of Anchor Damping in MEMS Tuning Fork Resonators |
5 |
| Design of a Dual Quantization Electromechanical Sigma-Delta Modulator MEMS Vibratory Wheel Gyroscope |
5 |
| Transition of Magnetic Field Due to Geometry of Magneto-Active Elastomer Microactuator With Nonlinear Deformation |
4 |
| MEMS Components for NMR Atomic Sensors |
4 |
| Harmonically-Driven Snapping of a Micromachined Bistable Mechanism With Ultra-Small Actuation Stroke |
4 |
| Wide Range Fabrication of Wrinkle Patterns for Maximizing Surface Charge Density of a Triboelectric Nanogenerator |
4 |
| Distributed MEMS Mass-Sensor Based on Piezoelectric Resonant Micro-Cantilevers |
4 |
| A Novel Design for Enhancing the Sensitivity of a Capacitive MEMS Device |
4 |
| A Two-Terminal Bistable Electrothermally Actuated Microswitch |
4 |
| Microfab in a Microwave Oven: Simultaneous Patterning and Bonding of Glass Microfluidic Devices |
4 |
