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Reinforcement Learning-Optimized Adaptive LESO for Disturbance Rejection in Magnetically Suspended Turbo Molecular Pump
Author: Zheng, Shiqiang; Hao, Mohan; Mao, Kun; Ma, Wenyue; Han, Xue; Yang, Quanyao
Journal: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. 2026; Vol. 39, Issue 1, pp. 129-138. DOI: 10.1109/TSM.2025.3638245
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Modeling and Scheduling of Dual-Arm Cluster Tools With Multifunctional Process Module
Author: Wu, Guanzhong; Xiong, Wenqing; Pan, Chunrong
Journal: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. 2026; Vol. 39, Issue 1, pp. 91-104. DOI: 10.1109/TSM.2025.3621092
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Multi-Scale Content-Aware Enhancement Dual-Branch CNN for LED-Chip Defect Classificatio
Author: Wei, Linyu; Cai, Jueping
Journal: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. 2026; Vol. 39, Issue 1, pp. 62-73. DOI: 10.1109/TSM.2025.3642343
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Data-Driven Coordinated Control of Czochralski Silicon Single Crystal Growth Operation Process Based on Indirect Control Strateg
Author: Ren, Jun-Chao; Liu, Ding; Wan, Yin
Journal: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. 2026; Vol. 39, Issue 1, pp. 36-45. DOI: 10.1109/TSM.2025.3620675
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A Condition Monitoring Method via a New Signal Expansion Strategy for the Crystal Lifting and Rotating Mechanis
Author: Mu, Lingxia; Liu, Ding; Wu, Shihai; Liu, Yuyu; Gao, Peiyuan; Liu, Han; Zhang, Youmin
Journal: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. 2026; Vol. 39, Issue 1, pp. 115-128. DOI: 10.1109/TSM.2025.3619539
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Simulation and Experimental Analysis of Contactless Chip Pickup Process Based on a Vortex Flow Grippe
Author: Zhai, Peiran; Xu, Zhoulong; Yin, Zhouping; Li, Xiaohang; Xie, Bin; Wu, Hao
Journal: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. 2025; Vol. 38, Issue 2, pp. 324-331. DOI: 10.1109/TSM.2025.3553559
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Fast and Accurate EUVL Thick-Mask Model Based on Multi-Channel Attention Networ
Author: Yu, Chengzhen; Liu, Sheng; Chen, Wensheng; Ma, Xu
Journal: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. 2025; Vol. 38, Issue 2, pp. 194-202. DOI: 10.1109/TSM.2025.3539300
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Fabrication of Porous Cu-Sn Microbumps for Low-Temperature Cu-Cu Bondin
Author: Wang, Zilin; Shi, Yunfan; Zhang, Qingchao; Zhou, Yikang; Wang, Qian; Wang, Zheyao
Journal: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. 2025; Vol. 38, Issue 2, pp. 343-351. DOI: 10.1109/TSM.2025.3529683