Ieee Transactions On Semiconductor Manufacturing

Ieee Transactions On Semiconductor Manufacturing

半导体制造的IEEE交易

  • 3区 中科院分区
  • Q2 JCR分区

高引用文章

文章名称 引用次数
Wafer Map Defect Pattern Classification and Image Retrieval Using Convolutional Neural Network 41
Classification of Mixed-Type Defect Patterns in Wafer Bin Maps Using Convolutional Neural Networks 24
Hybrid Particle Swarm Optimization Combined With Genetic Operators for Flexible Job-Shop Scheduling Under Uncertain Processing Time for Semiconductor Manufacturing 23
Convolutional Neural Network for Wafer Surface Defect Classification and the Detection of Unknown Defect Class 22
AdaBalGAN: An Improved Generative Adversarial Network With Imbalanced Learning for Wafer Defective Pattern Recognition 15
A Voting Ensemble Classifier for Wafer Map Defect Patterns Identification in Semiconductor Manufacturing 15
Epitaxial beta-Ga2O3 and beta-(AlxGa1-x)(2)O-3/beta-Ga2O3 Heterostructures Growth for Power Electronics 15
Decision Tree Ensemble-Based Wafer Map Failure Pattern Recognition Based on Radon Transform-Based Features 13
A Data Driven Cycle Time Prediction With Feature Selection in a Semiconductor Wafer Fabrication System 12
Deep-Structured Machine Learning Model for the Recognition of Mixed-Defect Patterns in Semiconductor Fabrication Processes 12
On-Chip Adaptive Body Bias for Reducing the Impact of NBTI on 6T SRAM Cells 11
Anomaly Detection and Segmentation for Wafer Defect Patterns Using Deep Convolutional Encoder-Decoder Neural Network Architectures in Semiconductor Manufacturing 10
A Computer Vision-Inspired Deep Learning Architecture for Virtual Metrology Modeling With 2-Dimensional Datale 9
Transfer-Learning-Based Online Mura Defect Classification 8
Fault Detection and Diagnosis Using Self-Attentive Convolutional Neural Networks for Variable-Length Sensor Data in Semiconductor Manufacturing 8
A Novel DBSCAN-Based Defect Pattern Detection and Classification Framework for Wafer Bin Map 8
Development of Large Diameter Semi-Insulating Gallium Oxide (Ga2O3) Substrates 7
Compact Analytical Model to Extract Write Static Noise Margin (WSNM) for SRAM Cell at 45-nm and 65-nm Nodes 7
Improved Normalized Cross-Correlation for Defect Detection in Printed-Circuit Boards 6
Temperature Dependent Electrical Transport Properties of High Carrier Mobility Reduced Graphene Oxide Thin Film Devices 6
Just-In-Time Modeling With Variable Shrinkage Based on Gaussian Processes for Semiconductor Manufacturing 6
Fault Detection Strategy Based on Weighted Distance of k Nearest Neighbors for Semiconductor Manufacturing Processes 5
On Effectiveness of Transfer Learning Approach for Neural Network-Based Virtual Metrology Modeling 4
Efficient Approach to Cyclic Scheduling of Single-Arm Cluster Tools With Chamber Cleaning Operations and Wafer Residency Time Constraint 4
Extreme Temperature Operation of Ultra-Wide Bandgap AlGaN High Electron Mobility Transistors 4
Feature Extraction From Analog Wafermaps: A Comparison of Classical Image Processing and a Deep Generative Model 4
Scheduling of Dual Resource Constrained Lithography Production: Using CP and MIP/CP 4
Making Use of Manufacturing Process Variations: A Dopingless Transistor Based-PUF for Hardware-Assisted Security 4
The Design and Implementation of an Embedded Real-Time Automated IC Marking Inspection System 4
Photoelectrochemical Etching Technology for Gallium Nitride Power and RF Devices 3
Denoised Residual Trace Analysis for Monitoring Semiconductor Process Faults 3
Enhanced Stacked Denoising Autoencoder-Based Feature Learning for Recognition of Wafer Map Defects 3
Clustering the Dominant Defective Patterns in Semiconductor Wafer Maps 3
Moisture Prevention in a Pre-Purged Front-Opening Unified Pod (FOUP) During Door Opening in a Mini-Environment 3
An Optimal Design Methodology for Yield-Improved and Low-Power Pipelined ADC 2
Wafer Map Defect Pattern Recognition Using Rotation-Invariant Features 2
Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables 2
Study on the Wear Characteristics of a Lapping Wheel in Double-Sided Lapping Based on the Trajectory Distribution 2
An Efficient and High Quality Chemical Mechanical Polishing Method for Copper Surface in 3D TSV Integration 2
Job Dispatch Control for Production Lines With Overlapped Time Window Constraints 2
Development of Novel Solar Cell Micro Crack Detection Technique 2
Real-Time Measurement of Exact Size and Refractive Index of Particles in Liquid by Flow Particle Tracking Method 2
A CNN-Based Transfer Learning Method for Defect Classification in Semiconductor Manufacturing 2
An Integrated Approach for IC Design R&D Portfolio Decision and Project Scheduling and a Case Study 2
An Online Virtual Metrology Model With Sample Selection for the Tracking of Dynamic Manufacturing Processes With Slow Drift 2
Wafer Defect Pattern Recognition and Analysis Based on Convolutional Neural Network 2
Effect of Large Particles During Chemical Mechanical Polishing Based on Numerical Modeling of Abrasive Particle Trajectories and Material Removal Non-Uniformity 2
An Improved GMM-Based Algorithm With Optima Multi-Color Subspaces for Color Difference Classification of Solar Cells 2
Practical Routing Algorithm Using a Congestion Monitoring System in Semiconductor Manufacturing 2
Wafer Level Variability Improvement by Spatial Source/Drain Activation and Ion Implantation Super Scan for FinFET Technology 2