Journal Of Vacuum Science & Technology A

Journal Of Vacuum Science & Technology A

真空科学与技术学报

  • 3区 中科院分区
  • Q3 JCR分区

发文分析

近年国家/地区发文量统计

国家/地区 数量
USA 368
Japan 77
GERMANY (FED REP GER) 61
South Korea 56
France 44
Sweden 33
CHINA MAINLAND 31
England 29
Finland 26
Netherlands 26

近年机构发文量统计

机构 数量
UNITED STATES DEPARTMENT OF ENERGY (DOE) 58
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (... 30
UNITED STATES DEPARTMENT OF DEFENSE 26
LINKOPING UNIVERSITY 25
UNIVERSITY OF ILLINOIS SYSTEM 24
UNIVERSITY OF CALIFORNIA SYSTEM 20
CEA 18
UNIVERSITY OF TEXAS SYSTEM 17
UNIVERSITY SYSTEM OF MARYLAND 17
LAM RESEARCH CORPORATION 16

近年文章引用他刊数据

文章名称 引用次数
Review Article: Stress in thin films and coatings: Curre... 72
Status and prospects of plasma-assisted atomic layer dep... 26
Practical guides for x-ray photoelectron spectroscopy: F... 23
Functional model for analysis of ALD nucleation and quan... 19
Review Article: Catalysts design and synthesis via selec... 16
Paradigm shift in thin-film growth by magnetron sputteri... 14
Review Article: Atomic layer deposition for oxide semico... 14
Atomic layer deposition of silicon-based dielectrics for... 13
Review Article: Crystal alignment for high performance o... 12
Vapor-deposited octadecanethiol masking layer on copper ... 11

近年被他刊引用数据

期刊名称 引用次数
J VAC SCI TECHNOL A 658
THIN SOLID FILMS 321
SURF COAT TECH 303
APPL SURF SCI 280
JPN J APPL PHYS 253
J APPL PHYS 217
J PHYS CHEM C 201
VACUUM 185
CHEM MATER 155
ACS APPL MATER INTER 149