Journal Of Vacuum Science And Technology B:nanotechnology And Microelectronics

Journal Of Vacuum Science And Technology B:nanotechnology And Microelectronics

真空科学与技术杂志B:纳米技术与微电子学

  • 4区 中科院分区

高引用文章

文章名称 引用次数
Review Article: Synthesis, properties, and applications of fluorescent diamond particles 21
Review Article: Atomic layer deposition of optoelectronic materials 14
Tutorial on interpreting x-ray photoelectron spectroscopy survey spectra: Questions and answers on spectra from the atomic layer deposition of Al2O3 on silicon 9
Future prospects of fluoride based upconversion nanoparticles for emerging applications in biomedical and energy harvesting 7
Realizing ferroelectric Hf0.5Zr0.5O2 with elemental capping layers 7
High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates 6
Minimal domain size necessary to simulate the field enhancement factor numerically with specified precision 6
Direct metal etch of ruthenium for advanced interconnect 6
Reduced twinning and surface roughness of Bi2Se3 and Bi2Te3 layers grown by molecular beam epitaxy on sapphire substrates 6
Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy 6
Polarization switching kinetics of the ferroelectric Al-doped HfO2 thin films prepared by atomic layer deposition with different ozone doses 6
Electrical and optical characterization of CdTe solar cells with CdS and CdSe butters-A comparative study 5
Principal component analysis image fusion of TOF-SIMS and microscopic images and low intensity secondary ion enhancement by pixel reduction 5
Flexible vertical-channel thin-film transistors using In-Ga-Zn-O active channel and polyimide spacer on poly(ethylene naphthalate) substrate 5
Enhanced green luminescence from ZnO nanorods 5
Characterization of the nature of shear-induced agglomerates as hard and soft in chemical mechanical polishing slurries 5
Thermal study of multilayer resistive random access memories based on HfO2 and Al2O3 oxides 5
Dual-band ultraviolet photodetectors comprising nanostructured MgZnO on ZnO films 5
Band alignment of atomic layer deposited SiO2 on (010) (Al0.14Ga0.86)(2)O-3 5
Effect of proton irradiation energy on SiNx/AlGaN/GaN metal-insulator semiconductor high electron mobility transistors 5
3D-printed microfluidics on thin poly(methyl methacrylate) substrates for genetic applications 5
Preparation and characterization of Al2O3 film deposited by RF sputtering and plasma enhanced atomic layer deposition 5
Numerical simulations of perovskite thin-film solar cells using a CdS hole blocking layer 5
Reactive sputter deposition of piezoelectric Sc0.12Al0.88N for contour mode resonators 5
Mitigating e-beam-induced hydrocarbon deposition on graphene for atomic-scale scanning transmission electron microscopy studies 5
Deep-ultraviolet light source with a carbon nanotube cold-cathode electron beam 5
High-temperature molecular beam epitaxy of hexagonal boron nitride layers 5
Electronic structure and dielectric function of Mn-Bi-Te layered compounds 5
Focussed helium ion channeling through Si nanomembranes 5
Comparative study of electron field emission from randomly-oriented and vertically-aligned carbon nanotubes synthesized on stainless steel substrates 5
Beyond equilibrium thermodynamics in the low temperature plasma processor 5
Study of charge transport properties in a ZnO/CdS/Cu(In,Ga)Se-2 solar cell via admittance spectroscopy 4
Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision 4
Forward bias degradation and thermal simulations of vertical geometry beta-Ga2O3 Schottky rectifiers 4
Fabrication and optical properties of regularly arranged GaN-based nanocolumns on Si substrate 4
Study of damage generation induced by focused helium ion beam in silicon 4
Comprehensive analysis of field-electron emission properties of nanosized silicon blade-type and needle-type field emitters 4
Local current-voltage estimation and characteristization based on field emission image processing of large-area field emitters 4
Characterization of thin carbon films capable of low-field electron emission 4
Growth of high-quality Bi2Se3 topological insulators using (Bi1-xInx)(2)Se-3 buffer layers 4
Multitechnique elemental depth profiling of InAlGaN and InAlN films 4
Influence of mask material on the electrical properties of selective area epitaxy GaN microstructures 4
Buffer insensitive optoelectronic quality of InP-on-Si with templated liquid phase growth 4
Eighteen mega-electron-volt alpha-particle damage in homoepitaxial beta-Ga2O3 Schottky rectifiers 4
Nitride etching with hydrofluorocarbons III: Comparison of C4H9F and CH3F for low-k ' nitride spacer etch processes 4
Reactivity studies and structural properties of Al on compound semiconductor surfaces 4
Combined interpolation, scale change, and noise reduction in spectral analysis 4
Tip-based nano-manufacturing and -metrology 3
Enhanced uniformity of III-nitride nanowire arrays on bulk metallic glass and nanocrystalline substrates 3
Improving the resolution and throughput of achromatic Talbot lithography 3